Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-08-30
2005-08-30
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000
Reexamination Certificate
active
06937319
ABSTRACT:
A high exposure accuracy is obtained while mitigating the influence of vibration by using an exposure method and an exposure apparatus. Columns (59A,59B) are installed on a base plate (12), a reticle base (62) is supported at the inside of the columns (59A,59B) by the aid of variable mount sections (61A,61B) having high rigidity, a finely movable stage (63) is movably placed on the reticle base (62) by the aid of air bearings, and a reticle (R1) as an exposure objective is placed on the finely movable stage (63). A coarsely movable stage (64) is hung on a bottom surface of a support plate (66) arranged over the reticle base (62) in a state capable of being driven in a scanning direction. The finely movable stage (63) is driven by the coarsely movable stage (64) in the scanning direction in a non-contact state with respect to the reticle base (62). The finely movable stage (63) is finely driven with respect to the coarsely movable stage (64) by an actuator arranged between the coarsely movable stage (64) and the finely movable stage (63).
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