Three-dimensional periodical structure, its manufacturing...

Details Three-dimensional periodical structure, its manufacturing... Three-dimensional periodical structure, its manufacturing...

2005-02-08

2005-02-08

Versteeg, Steven (Department: 1753)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S192320, C204S192370, C204S192230, C428S118000

Reexamination Certificate

active

06852203

ABSTRACT:
A three-dimensional periodical structure whose period is about 1 μm or smaller is provided. At least two kinds of films which have two-dimensionally substantially periodical projections are successively formed in layers substantially periodical to construct structure which is substantially three-dimensionally periodical. For instance, the films are made of materials different in refractive index. The three-dimensional periodical structure whose period is about 1 μm or smaller can be obtained by a simple fabricating method. By this structure, the propagation of a wave with a specific wavelength in many solid angular directions including several axial directions parallel to the plane and the thickness direction of the layers can be cut off.

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Yablonovitch, E., “Photonic Band-Gap Structures,” Journal of the Optical Society of America, vol. 10, No. 2, Feb. 1, 1993, pp. 283-295.
Kawakami, S., “Fabrication of Submicrometre 3D Periodic Structures Composed of Si/SiO/sub 2/”, Electronics Letters, Jul. 3, 1997, vol. 33, No. 14, pp. 1260-1261.

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