Method of manufacturing of contact plug in a contact hole on...

Details Method of manufacturing of contact plug in a contact hole on... Method of manufacturing of contact plug in a contact hole on...

2005-08-23

2005-08-23

Pham, Hoai (Department: 2814)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S597000, C438S618000

Reexamination Certificate

active

06933228

ABSTRACT:
A method of manufacturing a semiconductor device comprising the steps of: forming an insulating layer on a silicon substrate; forming a contact hole on the insulating layer; forming a nitride layer on the side of the contact hole; and forming a selective conductive plug in the contact hole including the nitride layer.

REFERENCES:
patent: 5073516 (1991-12-01), Moslehi
patent: 5273921 (1993-12-01), Neudeck et al.
patent: 5321306 (1994-06-01), Choi et al.
patent: 5434092 (1995-07-01), Neudeck et al.
patent: 5604368 (1997-02-01), Taur et al.
patent: 5804470 (1998-09-01), Wollesen
patent: 5895948 (1999-04-01), Mori et al.
patent: 5955759 (1999-09-01), Ismail et al.
patent: 6030894 (2000-02-01), Hada et al.
patent: 6090691 (2000-07-01), Ang et al.
patent: 6150190 (2000-11-01), Stankus et al.
patent: 6297162 (2001-10-01), Jang et al.
patent: 2001/0036730 (2001-11-01), Kim
patent: 59082768 (1984-05-01), None
patent: 59165461 (1984-09-01), None
patent: 59165462 (1984-09-01), None
patent: 59165463 (1984-09-01), None
patent: 59165464 (1984-09-01), None
patent: 59165465 (1984-09-01), None
patent: 59189677 (1984-10-01), None
patent: 61006195 (1986-01-01), None
patent: 63164355 (1988-07-01), None
patent: 2130919 (1990-05-01), None
patent: 7130682 (1995-05-01), None
patent: 10107219 (1998-04-01), None

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