Semiconductor on insulator device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S348000

Reexamination Certificate

active

06909155

ABSTRACT:
An N-channel MOS field-effect transistor on an SOI substrate including a source electrode, drain and gate electrodes both disposed via a field oxide film, a gate oxide film, a high concentration P-type layer, a high concentration N-type layer contacting the source electrode and the gate oxide film, a high concentration N-type layer contacting the drain electrode, a p-body layer contacting the high concentration P-type and N-type layers and the gate oxide film. In this transistor, an N-type layer with a concentration higher than that of a drain region contacting the p-body layer constitutes a region covering at most 95% of the source-drain distance. Further, an N-type region having a concentration from 3×1016/cm3to 1×1022/cm3is provided near a buried oxide film under the drain electrode.

REFERENCES:
patent: 5654561 (1997-08-01), Watabe
patent: 5777365 (1998-07-01), Yamaguchi et al.
patent: 6307224 (2001-10-01), Shirai
patent: 2002/0030238 (2002-03-01), Nakamura et al.
patent: 8-181321 (1996-07-01), None
patent: 2001102586 (2001-04-01), None

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