Fuse structure window

Details Fuse structure window Fuse structure window

2005-02-22

2005-02-22

Kang, Donghee (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

C257S208000, C257S209000, C257S530000

Reexamination Certificate

active

06858913

ABSTRACT:
The present invention provides a fuse structure. The fuse structure comprises a substrate, a plurality of conductive layers, a plurality of dielectric layers and a plurality of conductive plugs. The novel fuse structure includes a plurality of fuse units, and a new layout of the fuse units to increase the pitch between the fuse units, preventing the fuse structure from failing when misalignment of the laser beam and thermal scattering of the laser beam damage the second layer of the fuse structure in the laser blow process, thus increasing reliability and yield.

REFERENCES:
patent: 6100118 (2000-08-01), Shih et al.
patent: 6121073 (2000-09-01), Huang et al.
patent: 6162686 (2000-12-01), Huang et al.
patent: 6288436 (2001-09-01), Narayan et al.

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