Optical measuring device

Details Optical measuring device Optical measuring device

2005-09-06

2005-09-06

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

By focus detection

C359S368000

Reexamination Certificate

active

06940610

ABSTRACT:
The present invention relates to an optical measuring device (1) for measuring the shape of particularly rough surfaces of a test object (O), the measuring device including a device that has at least one light source (LQ), one illumination optics, one measuring optics, and at least one detection unit, for determining the intensity distribution of a measuring beam reflected from the surface as a function of a focus position relative to the object surface. A simple measurement even of highly inaccessible locations on the test object is made possible by the fact that the measuring optics has an optical probe for generating at least one intermediate image (ZW) of the observed surface area (FIG.1).

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