Micromechanical component with a dielectric movable structure, a

Details Micromechanical component with a dielectric movable structure, a Micromechanical component with a dielectric movable structure, a

1995-04-28

1997-02-11

Mintel, William

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257418, 257419, 257420, 7351422, 7351421, 7351432, 7351436, 73DIG1, H01L 2982

Patent

active

056024118

ABSTRACT:
A micromechanical component includes a fixed micromechanical structure having a pair of capacitor plates being formed of one or more conductive layers, and a movable micromechanical structure being formed of a dielectric layer to be introduced into or removed from an interstice between the plates. A capacitance change is obtained through the resilient or freely movable dielectric, so that the component can be inserted as a proportional or a non-proportional force sensor. A microsystem with an integrated circuit and a micromechanical component with a movable dielectric, as well as a production method for the component and the microsystem, are also provided.

REFERENCES:
patent: 4901586 (1990-02-01), Blake et al.
patent: 5157973 (1992-10-01), Ciminelli
patent: 5357806 (1994-10-01), Dennis et al.
Elsevier Sequoia Sensors and Actuators A, 39 (1993) 209-217, Matsumoto et al., "Integrated silicon . . . ".
IEEE Publication CH3075-9/91 (Gianchandant et al). p. 29.5.1-29.5.4, "A Bulk Silicon Dissolved Wafer Process," 1991.
IEEE Publ. CH2957-9/91 (Guckel et al.), pp. 74-79, "Fabrication of Assembled Micromechanical Components . . . ", 1991.
IEEE Publ. 0-7803-0817-4/92 (Tsang et al.), pp. 19.1.1-19.1.4., "A Low Cost Monolithic Accelerometer; . . . ", 1992.
IEEE Transducers 91 Publ. (Chen et al.), pp. 739-742, "A Selective CVD Tungsten Process for Micromotors", 1991.
Elsevier Science Publishers Microelectronic Eng. 13 (1991) 509-512 (Bley et al.), "Description of Micro . . . ".
Elsevier Sequoia Publication 1992 (Tavrow et al.), pp. 33-43, "Operational characteristics of microfabricated".
IOP Publ. 1991 (Mehregany et al.), pp. 73-85, "Surface micromachined mechanisms and micromotors".
Markt & Technik Publ. No. 40, Oct. 1, 1993, p. 12, "Mikromechanischer Neigungssensor".

Affiliated with

Also associated with

Rating

Micromechanical component with a dielectric movable structure, a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micromechanical component with a dielectric movable structure, a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micromechanical component with a dielectric movable structure, a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-344435