Small spot ellipsometer

Details Small spot ellipsometer Small spot ellipsometer

2005-03-22

2005-03-22

Nguyen, Tu T. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

06870621

ABSTRACT:
An ellipsometer capable of generating a small beam spot is disclosed. The ellipsometer includes a light source for generating a narrow bandwidth probe beam. An analyzer is provided for determining the change in polarization state of the probe beam after interaction with the sample. A lens is provided having a numerical aperture and focal length sufficient to focus the beam to a diameter of less than 20 microns on the sample surface. The lens is formed from a graded index glass wherein the index of refraction varies along its optical axis. The lens is held in a relatively stress free mount to reduce stress birefringence created in the lens due to changes in ambient temperature. The ellipsometer is capable of measuring features on semiconductors having a dimensions as small as 50×50 microns.

REFERENCES:
patent: 5483347 (1996-01-01), Hollmann
patent: 5502567 (1996-03-01), Pokrowsky et al.
patent: 5798837 (1998-08-01), Aspnes et al.
patent: 5825022 (1998-10-01), Takekoshi et al.
patent: 5898522 (1999-04-01), Herpst
patent: 5992179 (1999-11-01), Xu et al.
patent: 6124934 (2000-09-01), Shahar et al.
patent: 6134011 (2000-10-01), Klein et al.
patent: 6149276 (2000-11-01), Takeuchi et al.
patent: WO 9902970 (1999-01-01), None
patent: WO 0065331 (2000-01-01), None
Tutorial, Web pages, Light Path, Available www.light.new/products/glass/G101 et seq., Oct. 13, 2000, 24 pages in length.
On-line brochure printed from www.mellesgriot.com, “Collimating and Focusing Lenses,” Mar. 6, 2002, pp. 15.3-15.5.
On-line brochure printed from www.mellesgriot.com, “Gradient-Index Lenses,” Mar. 6, 2002, pp. 15.16-15.20.

Affiliated with

Also associated with

Rating

Small spot ellipsometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Small spot ellipsometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Small spot ellipsometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3443257