Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-10-11
2005-10-11
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S306000, C073S105000
Reexamination Certificate
active
06953930
ABSTRACT:
A conductive transparent probe used in a probe control apparatus for adjusting a distance between the apex of the probe and a sample by vibrating the probe with an vibrator in a direction perpendicular to the axis of the probe is provided. The conductive transparent probe includes: an optical fiber having a taper part at one end; a conductive transparent film formed on the surface of the taper part; a first metal film formed on the surface of the optical fiber other than the taper part; wherein the conductive transparent film and the first metal film are electrically connected, and length and thickness of the first metal film are determined such that the conductive transparent probe vibrates while contacting with the vibrator.
REFERENCES:
patent: 5559330 (1996-09-01), Murashita
patent: 5859364 (1999-01-01), Toda et al.
patent: 5994691 (1999-11-01), Konada
patent: 6006594 (1999-12-01), Karrai et al.
patent: 6094971 (2000-08-01), Edwards et al.
patent: 6104030 (2000-08-01), Chiba et al.
patent: 6138503 (2000-10-01), Ray
patent: 6201227 (2001-03-01), Tomita
patent: 6257053 (2001-07-01), Tomita et al.
patent: 6611178 (2003-08-01), Kawakatsu et al.
patent: 3121217 (2000-12-01), None
R. Toledo- Crow, et al., Appl. Phys. Lett., vol. 60, No. 24, pp. 2957-2959, “Near-Field Differential Scanning Optical Microscope With Atomic Force Regulation”, Jun. 15, 1992.
T. Murashita, J. Vac. Sci. Technol. B, vol. 15, No. 1, pp. 32-37, “Novel Conductive Transparent Tip for Low-Temperature Tunneling-Electron Luminescence Microscopy Using Tip Collection”, Jan./Feb. 1997.
T. Murashita, Oyo Buturi, vol. 70, No. 10, pp. 1191-1195, “Characterization of Semiconductors in Nanometer-Sized Regions by a Probe-Collection TL Microscope”, Oct. 2001 (corresponds to ref. AX).
T. Murashita, JSAP, “Share-Force Mode Atomic Force Microscopy by Using a Conductive Transparent Probe”, Sep. 2001 (with English translation).
Gurzo Paul M.
Lee John R.
Nippon Telegraph and Telephone Corporation
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