Abrading – Machine – Endless band tool
Reexamination Certificate
2005-04-12
2005-04-12
Wilson, Lee D. (Department: 3723)
Abrading
Machine
Endless band tool
C451S005000, C451S311000, C451S499000
Reexamination Certificate
active
06878048
ABSTRACT:
An apparatus for reducing non-uniform stretch of a belt used in the CMP system is disclosed. The belt that may be used with the apparatus extends between a first roller and a second roller to define a belt loop with an inner surface and an outer surface to be used for CMP. The apparatus includes a compensating roller that has a first end and a second end where the first end and second end extends a width of the belt. The first end and the second end have a first diameter. The center of the roller has a second diameter that is less than the first diameter. The compensating roller has a symmetrically tapered shape that extends between each of the first end and second end to the center. The compensating roller is positioned inside of the belt loop, and is applied to the inner surface of the belt loop to reduce non-uniform stretch of the belt.
REFERENCES:
patent: 4187645 (1980-02-01), Lind
patent: 4443977 (1984-04-01), Gaiani
patent: 5871390 (1999-02-01), Pant et al.
patent: 6261163 (2001-07-01), Walker et al.
patent: 6428394 (2002-08-01), Mooring et al.
Gotkis Yehiel
Owzarz Aleksander
Wei David
Lam Research Corporation
Martine & Penilla & Gencarella LLP
Ojini Anthony
Wilson Lee D.
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