Light energy detecting apparatus for exposure condition...

Details Light energy detecting apparatus for exposure condition... Light energy detecting apparatus for exposure condition...

2005-10-18

2005-10-18

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S067000, C355S068000, C355S069000, C250S205000, C250S548000, C356S400000, C356S401000

Reexamination Certificate

active

06956640

ABSTRACT:
A light energy inspecting apparatus provides an optimum exposure condition in photolithographic apparatus by sensing the energy levels of light passing through the aperture of a diaphragm. The light energy inspecting apparatus includes a photoelectric transformation unit, a drive mechanism for the photoelectric transformation unit, and a controller. The photoelectric transformation unit is made up of a plurality of photoelectric transformation devices (PTDs) which can each sense the level of energy of incident light and convert the incident light to a corresponding electric signal. The drive mechanism positions the photoelectric transformation unit relative to the diaphragm.

REFERENCES:
patent: 5475491 (1995-12-01), Shiozawa
patent: 5767950 (1998-06-01), Hawver et al.
patent: 5898477 (1999-04-01), Yoshimura et al.
patent: 6744492 (2004-06-01), Takahashi et al.

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