Method and apparatus for inspecting defects

Details Method and apparatus for inspecting defects Method and apparatus for inspecting defects

2005-04-12

2005-04-12

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500, C250S559450

Reexamination Certificate

active

06879392

ABSTRACT:
In a defect inspecting apparatus, having contrast, brightness and appearance of a target for inspection and detection sensitivity of a defect changed depending on optical system conditions, and adapted to perform inspection by selecting an optimal test condition, even an unskilled user can easily select an optimal optical condition by quantitatively displaying evaluation values side by side when optical system conditions are changed. Moreover, by selecting an evaluation item having highest satisfaction based on a result of a series of test inspection, an optimal test condition can be automatically selected.

REFERENCES:
patent: 5963314 (1999-10-01), Worster et al.
patent: 6539106 (2003-03-01), Gallarda et al.
patent: 2000-161932 (2000-06-01), None
patent: 2000-193594 (2000-07-01), None

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