Devices containing zirconium-platinum-containing materials...

Details Devices containing zirconium-platinum-containing materials... Devices containing zirconium-platinum-containing materials...

2005-09-20

2005-09-20

Wilson, Christian (Department: 2891)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S652000, C438S653000

Reexamination Certificate

active

06946395

ABSTRACT:
Methods for forming materials containing both zirconium and platinum, such as platinum-zirconium films, and articles containing such materials. The resultant films can be used as electrodes in an integrated circuit structure, particularly in a memory device such as a ferroelectric memory device. The platinum-zirconium materials can also be used in catalyst materials.

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