Method for locally heating a region in a semiconductor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S540000, C438S681000, C438S799000

Reexamination Certificate

active

06900130

ABSTRACT:
A method is proposed for locally heating a region that is disposed in a substrate. A substrate is provided and at least one region is produced in the substrate with a lower specific resistance than the surrounding substrate. The region is then locally heated by inducing eddy currents by irradiation with electromagnetic energy.

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Gerasimenko, “UHF Annealing of Semiconductors and Microelectronics Structures,” Oboronnyi Kompleks—Nauchno-Tekhnicheskomu Progressu Rossii, vol. 4, p. 42-44 (2002).*
Licari, “Coating Materials For Electronic Applications”, pp. 31-35 (Noyes Publication).

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