Method and apparatus for aerial image improvement in...

Details Method and apparatus for aerial image improvement in... Method and apparatus for aerial image improvement in...

2005-05-24

2005-05-24

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S067000

Reexamination Certificate

active

06897943

ABSTRACT:
A plate50for projection lithography comprising a first opaque region54located at the center of the plate50and a second opaque region56formed at the outer edge52of the plate. The first and second opaque regions define a light transmissive annular region58.The annular region58comprises a first light transmissive area60, 62that imparts a first phase shift to light passing therethrough and a second light transmissive area64, 66,which imparts a second phase shift to light passing therethrough.

REFERENCES:
patent: 5348837 (1994-09-01), Fukuda et al.
patent: 5642183 (1997-06-01), Sugihara et al.

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