Semiconductor device

Details Semiconductor device Semiconductor device

2005-01-04

2005-01-04

Ngô, Ngân V. (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S329000, C257S330000, C257S332000, C257S334000

Reexamination Certificate

active

06838730

ABSTRACT:
A semiconductor device comprises a first semiconductor layer of a first conductivity type, a second semiconductor layer of the first conductivity type formed in an upper surface of the first semiconductor layer, resistance of the second semiconductor layer being higher than that of the first semiconductor layer, a base layer of a second conductivity type formed on the second semiconductor layer, gate electrodes deposited in a plurality of first trenches, a gate insulation film being disposed between inner walls and the gate electrodes, each of the first trenches having a band-shaped planar pattern and extending from top of the base layer down to the upper surface of the second semiconductor layer, bridge electrodes filling a plurality of second trenches and surrounded by an insulation film deposited over walls of the trenches, the second trenches extending from the top of the base layer down to the upper surface of the second semiconductor layer and connecting adjacent ones of the first trenches in communication with one another so that each of the bridge electrodes electrically connects adjacent ones of the gate electrodes, an impurity diffused region of the second conductivity type formed in the second semiconductor layer adapted to surround the second trenches existing in the second semiconductor layer, a source region of the first conductivity type formed in a surface area of the base layer alongside extensions of the gate electrodes, a source electrode formed on the surface of the source region, and a drain electrode formed on a back surface of the first semiconductor layer.

REFERENCES:
patent: 6545315 (2003-04-01), Hshieh et al.
patent: 20020038887 (2002-04-01), Ninomiya et al.
patent: 2000-299464 (2000-10-01), None

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