Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2005-05-24
2005-05-24
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C118S724000, C118S725000, C118S050100, C392S416000, C392S418000
Reexamination Certificate
active
06897411
ABSTRACT:
A heated substrate support and method for making the same is generally provided. In one embodiment, a heated support includes a first and second plates having a heating element disposed therebetween. The heating element is biased against the first plate to provide good heat transfer therewith. In another embodiment, a heated support includes a first metallic plate coupled to a second metallic plate and sandwiching at least one guide therebetween. A resistive heating element is laterally retained by the guide relative to the first plate. In another aspect of the invention, a heating chamber for heating a substrate is provided. In one embodiment, the heating chamber includes walls defining an interior volume and a plurality of heated support plates coupled to the walls. The support plates are generally stacked parallel to each other within the interior volume. A heating element is urged against each first support plate.
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Beer Emanuel
Inagawa Makoto
Applied Materials Inc.
Fuqua Shawntina
Moser Patterson & Sheridan LLP
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