Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2005-01-04
2005-01-04
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S310000, C250S42300F, C250S442110
Reexamination Certificate
active
06838668
ABSTRACT:
A system for obtaining an image of a cross-sectional surface of a workpiece includes a shaped beam ion projection column oriented along a first axis. The ion projection column projects an image of an aperture on the workpiece surface, thereby excavating a portion of the surface and exposing a cross-sectional surface. Because the ion beam is not focused on the surface, a low brightness ion source can be used. A focused particle beam column, typically a scanning electron microscope, is oriented along a second axis that intersects the first axis at a selected angle. This focused particle beam column generates a particle beam that is used to image the cross-sectional surface exposed by the ion projection column.
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Berger Steve
Scipioni Lawrence
FEI Company
Lee John R.
Leybourne James J.
Scheinberg Michael O.
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