Semiconductor manufacturing device

Details Semiconductor manufacturing device Semiconductor manufacturing device

2005-01-04

2005-01-04

Wilczewski, M. (Department: 2822)

Coating apparatus

With indicating, testing, inspecting, or measuring means

With means for visual observation

C118S715000, C118S719000, C118S729000, C422S110000

Reexamination Certificate

active

06837936

ABSTRACT:
The semiconductor manufacturing device according to the present invention having a mechanical drive part which is moved in a vacuum device while holding a substrate includes at least one discharge port for introducing an inert gas into the vacuum device, and a flow rate control part for controlling the inert gas which is discharged into the vacuum device from the discharge port at a constant flow rate.

REFERENCES:
patent: 6224679 (2001-05-01), Sasaki et al.
patent: 6383897 (2002-05-01), Mikata
patent: 6524650 (2003-02-01), Shimahara et al.
patent: 6616898 (2003-09-01), Hara et al.
patent: 5-55330 (1993-03-01), None

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