Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2005-05-03
2005-05-03
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S309000, C250S310000, C250S443100
Reexamination Certificate
active
06888136
ABSTRACT:
In relatively thick samples for electron microscopy imaging, details of interest are often located in the bulk of the sample, so that they cannot be directly imaged in the form of a SEM image. According to the invention, so as to expose the cross-section containing the details of interest, the frozen sample is subjected to ion milling, in such a manner that the desired cross-section is exposed. Thereafter, the exposed cross-section is further eroded in a controlled manner via sublimation, whereby the detail of interest is approached in a very accurate manner, and its fine details become visible. Hereafter, the finally desired SEM image can be made. By repetition of this process, a large number of successive cross-sections can be imaged, so that a spatial representation of the sample is obtained.
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Geurts Remco Theodorus Johannes Petrus
Hayles Michael Frederick
Quash Anthony
Scheinberg Michael D.
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