Design driven inspection or measurement for semiconductor...

Details Design driven inspection or measurement for semiconductor... Design driven inspection or measurement for semiconductor...

2005-04-26

2005-04-26

Do, Thuan (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C716S030000

Reexamination Certificate

active

06886153

ABSTRACT:
Design driven inspection/metrology methods and apparatus are provided. A recipe is a set of instructions including wafer processing parameters, inspection parameters, or control parameters for telling an inspection/metrology system how to inspect/measure a wafer. Design data is imported into a recipe extraction system that recognizes instances of target structures and configures recipe parameters accordingly, thereby reducing manual instrument setup time, improving inspection/measurement accuracy, and improving fabrication efficiency.

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patent: 20020165636 (2002-11-01), Hasan
SPIE Handbook of Microlithography, Micromachining and Microfabrication, vol. 1: Microlithography [online], [retrieved on Nov. 29, 2001] Retreived from <URL: http://www.cnf.cornell.edu/SPIEBook/spie9.htm.
Operations Manual for Model F5, KLA-Tencor Corp., Chapters 3, 4: Creating and Editing Recipes, Manual: 04-0452A, Dec. 1998, pp. 3-1 to 4-44.
Operations Manual for Model AIT, KLA-Tencor Corp., Chapters 4,5: Creating Recipes, #530131-36 Rev. A 4/99, pp. 77-144.

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