Coating apparatus – Gas or vapor deposition
Patent
1994-12-14
1997-02-11
Nguyen, Nam
Coating apparatus
Gas or vapor deposition
13762541, C23C 1600
Patent
active
056016514
ABSTRACT:
A fluid switching valve comprises a valve box and a rotary valve element. The valve box is provided with a plurality of fluid inlets and a single fluid outlet connected with each other by a fluid passage, wherein the rotary valve element is formed to block the fluid passage for an arbitrary rotational angle of the valve element, by engaging with an inner wall of the fluid passage. The valve element carries on an outer surface thereof a plurality of grooves in correspondence to the plurality of fluid inlets, wherein each of the grooves has a cross sectional area that changes from a first end to a second end, such that a sum of the cross sectional areas of the plurality of grooves is maintained substantially constant.
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Fujitsu Limited
Lund Jeffrie R.
Nguyen Nam
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