Coating processes – Measuring – testing – or indicating
Reexamination Certificate
2005-01-04
2005-01-04
Chen, Bret (Department: 1762)
Coating processes
Measuring, testing, or indicating
C427S096400, C427S248100
Reexamination Certificate
active
06838114
ABSTRACT:
Methods for depositing materials onto micro-device workpieces in a reaction chamber. One embodiment of such a method comprises providing a flow of a first precursor through the reaction chamber to deposit the first precursor onto the micro-device workpiece in the reaction chamber, and providing a flow of a purge gas through the reaction chamber to purge excess amounts of the first precursor. The method continues by monitoring a parameter correlated to a quantity of the first precursor and/or the purge gas in the reaction chamber as the first precursor and/or the purge gas flows through the reaction chamber. An additional aspect of this method is terminating the flow of the first precursor and/or the flow of the purge gas based on the monitored parameter of the quantity of the first precursor and/or the purge gas. The procedure of monitoring a parameter correlated to a quantity of the first precursor and/or the purge gas can comprise determining a concentration of the first precursor and/or the purge gas in the reaction chamber using a selected radiation.
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Carpenter Craig M.
Dando Ross S.
Mardian Allen P.
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