Electron beam length-measurement apparatus and measurement...

Details Electron beam length-measurement apparatus and measurement... Electron beam length-measurement apparatus and measurement...

2005-01-18

2005-01-18

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

06844549

ABSTRACT:
An electron beam length-measurement apparatus for measuring a length of a predetermined portion of an object by using an electron beam, includes: an electron gun for emitting the electron beam; a deflecting unit for deflecting the electron beam; an object holding unit on which the object is to be placed; a detector for detecting electrons that are scattered by the electron beam; a memory for storing layout position information that specifies a layout position at which the predetermined portion of the object; a length-measurement scanning controller for controlling the deflecting unit to scan with the electron beam to allow the layout position on the object to be irradiated with the electron beam; and a measurement unit operable to measure the length of the predetermined portion of the object based on a changing manner of the electrons successively detected by the detector while the length-measurement scanning controller scans with the electron beam.

REFERENCES:
patent: 4741669 (1988-05-01), Shimokawabe
patent: 6476388 (2002-11-01), Nakagaki et al.
patent: 6538249 (2003-03-01), Takane et al.
patent: 04-038412 (1992-02-01), None
patent: 07-243835 (1995-09-01), None
patent: 11-149895 (1999-06-01), None

Affiliated with

Also associated with

Rating

Electron beam length-measurement apparatus and measurement... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electron beam length-measurement apparatus and measurement..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electron beam length-measurement apparatus and measurement... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3378681