Semiconductor device, nonvolatile semiconductor storage...

Details Semiconductor device, nonvolatile semiconductor storage... Semiconductor device, nonvolatile semiconductor storage...

2005-07-12

2005-07-12

Tran, Thien F (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S317000, C257S319000, C257S320000, C257S321000, C257S322000

Reexamination Certificate

active

06917071

ABSTRACT:
There are provided a semiconductor device which is operable with a small occupied area, high reliability, and low power consumption, a nonvolatile semiconductor storage apparatus using the device and a manufacture method of the device. A semiconductor device of the present invention comprises a first gate insulating film, floating gate, second gate insulating film, and control gate on a semiconductor substrate, and a source area and a drain area formed in the semiconductor substrate on opposite sides of the floating gate, the floating gate comprises a first floating gate and a second floating gate disposed to cover the first floating gate, and an isolating gate is formed on the second floating gate on the side of the semiconductor substrate, and parallel to the first floating gate via an isolating insulating film26.

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