Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-05-03
2005-05-03
Ashton, Rosemary (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S921000
Reexamination Certificate
active
06887648
ABSTRACT:
Antireflective compositions are provided that contain an ionic thermal acid generator material. Use of such a thermal acid generator material can significantly increase the shelf life of solutions of antireflective compositions in protic media. Antireflective compositions of the invention can be effectively used at a variety of wavelengths used to expose an overcoated photoresist layer, including 248 nm and 193 nm.
REFERENCES:
patent: 4661429 (1987-04-01), Molaire et al.
patent: 5851730 (1998-12-01), Thackeray et al.
patent: 5935760 (1999-08-01), Shao et al.
patent: 5939236 (1999-08-01), Pavelchek et al.
patent: 6033830 (2000-03-01), Sinta et al.
patent: 6156479 (2000-12-01), Meador et al.
patent: 6190839 (2001-02-01), Pavelchek et al.
patent: 6261743 (2001-07-01), Pavelchek et al.
patent: 6316165 (2001-11-01), Pavelchek et al.
patent: 6323310 (2001-11-01), Puligadda et al.
patent: 6410209 (2002-06-01), Adams et al.
patent: 6451503 (2002-09-01), Thackeray et al.
patent: 6461717 (2002-10-01), Rutter, Jr. et al.
patent: 6472128 (2002-10-01), Thackeray et al.
patent: 6503689 (2003-01-01), Zampini et al.
patent: 6528235 (2003-03-01), Thackeray et al.
patent: 6767689 (2004-07-01), Pavelchek et al.
patent: 6773864 (2004-08-01), Thackeray et al.
patent: 20020022196 (2002-02-01), Pavelchek et al.
patent: 20020031729 (2002-03-01), Trefonas, III et al.
patent: 20020094382 (2002-07-01), Imai et al.
patent: 20020127490 (2002-09-01), Brock et al.
patent: 20030008237 (2003-01-01), Pavelchek et al.
patent: 0 425 142 (1991-05-01), None
patent: 0 763 781 (1997-03-01), None
patent: 0 813 114 (1997-12-01), None
patent: 1 035 442 (2000-09-01), None
patent: 1 061 560 (2000-12-01), None
patent: 1 172 695 (2002-01-01), None
European Search Report of corresponding European Application Serial No. 02253293.1-1242.
Pavelchek Edward K.
Trefonas, III Peter
Ashton Rosemary
Corless Peter F.
Edwards & Angell LLP
Frickey Darryl P.
Shipley Company L.L.C.
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