Storage cell field and method of producing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257SE21653, C257SE27093, C438S222000, C438S245000, C438S481000

Reexamination Certificate

active

06873000

ABSTRACT:
A storage cell field has a plurality of storage cells formed in a substrate of a first doping type, said storage cells comprising a trench capacitor arranged in said substrate and a selection transistor associated with said trench capacitor and provided with a transistor body which is arranged in said substrate. An implantation having an increased dopant concentration of the first doping type is provided in said substrate. This implantation prevents space-charge zones, which are located at the trench capacitors and which are caused in predetermined storage states of said trench capacitors, from constricting a substrate region, which is available for applying a predetermined potential to the transistor bodies, in such a way that said predetermined potential cannot be applied.

REFERENCES:
patent: 4906591 (1990-03-01), Okumura
patent: 6326262 (2001-12-01), Temmler et al.
patent: 38 41 927 (1989-06-01), None
patent: 38 44 388 (1989-08-01), None
patent: 2 215 913 (1989-09-01), None
D. Widmann et al.: “Technologie hochintegrierter Schaltungen” [technology of highly integrated circuits],Springer Verlag, Berlin, 2nded., 1996, pp. 290-293, 334-349.

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