Cooling system for magnetron sputtering apparatus

Details Cooling system for magnetron sputtering apparatus Cooling system for magnetron sputtering apparatus

2005-04-19

2005-04-19

McDonald, Rodney G. (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298200

Reexamination Certificate

active

06881310

ABSTRACT:
Apparatus and method for cooling a magnetron sputtering apparatus. More particularly, a system including a stationary conduit, a hollow drive shaft rotatably coupled to the stationary conduit, and a magnetron coupled to the hollow drive shaft.

REFERENCES:
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patent: 5200049 (1993-04-01), Stevenson et al.
patent: 5953827 (1999-09-01), Or et al.
patent: 6641701 (2003-11-01), Tepman
patent: 59-215484 (1984-12-01), None
“High Pressure/Low Torque Water Union, ” Data Sheet,Deublin Company, Model 927, pp. 1.

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