Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2005-03-29
2005-03-29
Chea, Thorl (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C005S008000, C005S306000, C005S306000, C369S100000, C369S277000
Reexamination Certificate
active
06872511
ABSTRACT:
A method for forming micropatterns includes forming a thin film consisting of a single layer or of plural layers on a substrate, irradiating an energy beam to the thin film to elevate the temperature of a region to a predetermined temperature or higher to thereby modify the region of the thin film, and patterning the thin film at least in such a manner to leave over the modified region.
REFERENCES:
patent: 4729940 (1988-03-01), Nee et al.
patent: 4797316 (1989-01-01), Hecq et al.
patent: 3-63947 (1991-03-01), None
Hirokane Junji
Mieda Michinobu
Mori Go
Chea Thorl
Conlin David G.
Edwards & Angell LLP
Roos Richard J.
Sharp Kabushiki Kaisha
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