Temperature adjusting method and apparatus therefor using at lea

Details Temperature adjusting method and apparatus therefor using at lea Temperature adjusting method and apparatus therefor using at lea

1997-01-23

1999-02-23

Arana, Louis

Data processing: measuring, calibrating, or testing

Measurement system

Temperature measuring system

702 99, H05B 102

Patent

active

058754164

ABSTRACT:
The temperature adjusting apparatus of a heat treatment equipment includes a first temperature sensor, provided close to an object to be treated in a heat treatment furnace of the heat treatment equipment for detecting a treatment temperature of a position close to the object to be treated, a second temperature sensor, provided close to an outer surface of the heat treatment furnace, for detecting a heating temperature of the heat treatment furnace, and a calculation circuit for calculating a target value of the second temperature sensor by subtracting a correction value from a set temperature of the first temperature sensor. Further included is a heat adjustment section for adjusting heating of the heat treatment furnace in accordance with a deviation between the target value of the second temperature sensor and a detection value of the second temperature sensor. There is a correction value output circuit for calculating the correction value on the basis of a difference between a detection value of the second temperature sensor converged when the detection value of the second temperature sensor has converged in the heat adjustment by the heat adjustment section and the detection value of the first temperature sensor. There is then performed an updating of the correction value when the detection value of the first temperature sensor is not equal to the set value.

REFERENCES:
patent: 4761538 (1988-08-01), Chiba et al.
patent: 5305417 (1994-04-01), Najm et al.
patent: 5334251 (1994-08-01), Nashimoto
patent: 5436172 (1995-07-01), Moslehi
patent: 5702624 (1997-12-01), Liao et al.

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