Material or article handling – Device for emptying portable receptacle – Nongravity type
Reexamination Certificate
2000-10-05
2003-06-03
Lillis, Eileen D. (Department: 3652)
Material or article handling
Device for emptying portable receptacle
Nongravity type
C414S940000, C414S810000
Reexamination Certificate
active
06572321
ABSTRACT:
FIELD OF THE INVENTION
The present invention relates to a method and apparatus for transferring objects, and specifically to an improved method and apparatus for the automated transfer of semiconductor substrates to a processing tool.
BACKGROUND OF THE INVENTION
A factory for manufacturing semiconductor substrates (e.g., patterned or unpatterned wafers) is conventionally known as a “FAB.” Within the FAB, a transfer conveyor transports semiconductor wafers in what is known as a wafer carrier (e.g., a sealed pod, a cassette, a container, etc.) between various processing systems, wherein a wafer carrier is placed on a mechanism known as a load port (i.e., a mechanism which supports a wafer carrier while wafers are extracted from the wafer carrier and transported into a processing system coupled thereto). Typically, either an operator or a front-end robot employs complex multi-axis movement to transfer a wafer carrier between the transfer conveyor and the load port. The complex multi-axis movement required for the front-end loader robot to transfer a wafer carrier between the transfer conveyor and the load port increases equipment expense and reduces equipment reliability.
Further, the semiconductor industry is increasing the number of devices which can be produced on a single wafer. Thus, wafer sizes are larger (e.g., 300 mm), which increases the weight of a loaded wafer carrier, and makes manual transfer more difficult.
Accordingly, there is a need for an improved system which receives wafer carriers from a transfer conveyor and transfers the wafer carriers to a load port.
SUMMARY OF THE INVENTION
The present invention provides an inventive loader conveyor adapted so as to receive a wafer carrier from a transfer conveyor and transfer the wafer carrier to a load port. The inventive loader conveyor is adapted to terminate at an intersection with a processing system. The inventive loader conveyor may comprise an extension mechanism adapted to selectively extend and retract so as to receive a wafer carrier from a transfer conveyor and transfer the wafer carrier to a load port and/or so as to provide space between the transfer conveyor and the load port as needed for human access, for maintenance or for any other purpose. The inventive loader conveyor eliminates the need for the front-end loader robot which, in turn, reduces equipment expense and increases equipment reliability.
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Applied Materials Inc.
Dugan & Dugan LLP
Fox Charles A.
Lillis Eileen D.
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