Method of forming hard carbon film over the inner surface of gui

Details Method of forming hard carbon film over the inner surface of gui Method of forming hard carbon film over the inner surface of gui

1997-08-14

1999-08-17

King, Roy V.

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

427237, 427238, 427239, 4272557, 427249, B05D 306, B05D 722, C23C 1626, B23B 1302

Patent

active

059391529

ABSTRACT:
A hard carbon film is formed in a vacuum vessel directly or through an intermediate layer for enhancing adhesion over an inner surface of a guide bush with a uniform thickness and excellent adhesion wherein the inner surface is in sliding contact with a workpiece and the guide bush is mounted on an automatic lathe for holding the workpiece rotatably and slidably in the axial direction near a cutting tool. Accordingly, the method comprises disposing the guide bush in a vacuum vessel, inserting an auxiliary electrode into the center bore forming the inner surface of the guide bush to be at a ground potential, introducing a gas containing carbon into the vacuum vessel through the gas inlet port after evacuating the vacuum vessel, and applying a DC voltage to the guide bush through a reactor, thereby producing a plasma in the vacuum vessel so that a hard carbon film of hydrogenated amorphous carbon is formed over the inner surface of the guide bush by a plasma CVD method.

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