Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1992-08-25
1993-12-21
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Step and repeat
355 43, 355 71, 356401, G03B 2742
Patent
active
052725014
ABSTRACT:
A projection exposure apparatus having an irradiation optical system for irradiating a pattern formed on a mask with first irradiation light, a projection optical system for imaging and projecting the image of the pattern of the mask onto a photosensitive substrate, and a mark detection device for irradiating a predetermined mark formed on the photosensitive substrate with second irradiation light in a wavelength region which is different from that of the first irradiation light by the projection optical system and detecting light generated from the mark, the projection exposure apparatus including: a deflection member disposed on a pupil surface of the projection optical system or in a periphery in an adjacent plane of the same, shielding a beam, which is a portion of the first irradiation light generated from the mask and incident on the projection optical system, and which passes through the peripheral portion of the pupil surface of the projection optical system, deflecting the second irradiation light by a predetermined quantity and passing the deflected second irradiation light, wherein the mark detection device includes an irradiation system for emitting the second irradiation light to travel toward the deflection member.
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Kamiya Saburo
Nishi Kenji
Shiraishi Naomasa
Nikon Corporation
Wintercorn Richard A.
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