Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent
1995-05-03
1998-10-13
Dye, Rena L.
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
428 344, 219420, 219421, 392389, 432263, 432265, 432156, 432157, F27B 1410
Patent
active
058206817
ABSTRACT:
A unibody, monolithic, one-piece negative draft crucible for a MBE effusion cell. The crucible maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion effects, and short term shutter-related flux transients. The invention also provides a method and mandrel apparatus for making a unibody containment structure, such as a crucible formed of PBN, having a negative draft, via chemical vapor deposition.
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Crucible Weldment --175, 2.75", 4.5" CF Mount Drawing, EPI, 1290 Hammond Rd., St. Paul, Minnesota, drawn May 18, 1992.
Colombo Paul E.
Donadio Robert F.
Chorus Corporation
Dye Rena L.
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