Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1992-08-05
1993-12-21
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156643, 156656, 156667, 252 792, 252 793, 252 794, B44C 122, C23F 100
Patent
active
052717976
ABSTRACT:
A method for patterning a metal oxide thin film comprising the steps of: (1) preparing a mixture solution containing alkoxide or alkoxyalcoholate and alcohol or alkoxyalcohol, (2) mixing an acid-generating agent with the mixture solution, (3) applying the mixture solution to a substrate to form a thin film and drying the thin film, (4) selectively irradiating the thin film formed on the substrate to accelerate the gelation, (5) removing the non-irradiated thin film, and (6) burning the remaining thin film. According to the present invention, a metal oxide thin film is formed by sol-gel method, and thereto is mixed an acid-generating agent, so that etching by irradiating can be applied to a precursor thin film not sintered. Thanks to this, a metal oxide thin film can be easily patterned with a fine processing.
REFERENCES:
patent: 4838989 (1989-06-01), Ashby et al.
patent: 4874462 (1989-10-01), Makita et al.
Powell William A.
Rohm & Co., Ltd.
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