Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2001-07-17
2003-03-18
Le, Vu A. (Department: 2824)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S059000, C257S219000, C257S226000, C257S347000, C257S349000, C257S352000
Reexamination Certificate
active
06534822
ABSTRACT:
TECHNICAL FIELD
The present invention generally relates to the design of field effect transistors (FETs) and, more particularly to a static induction type FET with a Schotkky gate structure formed on a silicon on insulator (SOI) wafer.
BACKGROUND OF THE INVENTION
Conventional or bulk semiconductor devices are formed in semiconductive material by implanting a well of either P-type or N-type conductivity silicon in a silicon substrate wafer of the opposite conductivity. Gates and source/drain diffusions are then manufactured using commonly known processes. These form devices known as metal-oxide-semiconductor (MOS) field effect transistors (FETs). When a given chip uses both P-type and N-type, it is known as a complimentary metal oxide semiconductor (CMOS). Each of these transistors must be electrically isolated from the others in order to avoid shorting the circuits. A relatively large amount of surface area is needed for the electrical isolation of the various transistors. This is undesirable for the current industry goals for size reduction. Additionally, junction capacitance between the source/drain and the bulk substrate increase power consumption, require higher threshold voltages, and slows the speed at which a device using such transistors can operate (e.g. degrades frequency response). These problems result in difficulties in reducing the size, power consumption, and voltage of CMOS technology devices.
In order to deal with the junction capacitance problem and improve frequency response, silicon on insulator technology (SOI) has been gaining popularity. A SOI wafer is formed from a bulk silicon wafer by using conventional oxygen implantation techniques to create a buried oxide layer at a predetermined depth below the surface. The implanted oxygen oxidizes the silicon into insulating silicon dioxide in a guassian distribution pattern centered at the predetermined depth to form the buried oxide layer.
An SOI field effect transistor comprises two separated regions consisting of the source and drain regions of the transistor of a first semiconductor conductivity and a channel region between them of the opposite semiconductor conductivity covered by a thin gate insulator and a conductive gate. Conduction in the channel region normally occurs immediately below the gate insulator in the region in which depletion can be controlled by the gate voltage.
A problem associated with reducing the size of an SOI FET structure is a reduction in the length of the channel (distance between the source region and the drain region) degrades FET performance because of a phenomenon known as the short channel effect. More specifically, the decreased channel length permits depletion regions adjacent to the source region and the drain region to extend towards the center of the channel which increases the off state current flow through the channel (current flow when the gate potential is below threshold) and the reduced channel width tends to decrease current flow when the gate potential is above threshold.
Accordingly, there is a strong need in the art for a silicon on insulator field effect transistor structure which can be scaled to sub-micron dimension without significant performance degradation.
SUMMARY OF THE INVENTION
A first object of this invention is to provide a transistor structure. The structure comprises a central channel region comprising a semiconductor lightly doped with an impurity element to increase free carriers and a source region and a drain region, on opposing sides of the central channel region. Both the source region and the drain region comprise the semiconductor material heavily doped with the impurity element. A gate, adjacent the channel region and forming a Schottky junction with the channel region, is comprised of a metal with an energy gap greater than the semiconductor for controlling depletion of the free carriers within the channel region adjacent to the gate.
The transistor structure also includes a backgate which is adjacent to the channel region and on an opposing side of the channel region from the gate. The backgate also forms a Schottky junction with the channel region and comprises the metal and controls depletion of the free carriers within the channel region.
The semiconductor may be silicon and the impurity may be a donor impurity such as arsenic such that the free carriers are electrons. The metal may be any of tungsten, titanium nitride, or silicide.
A second aspect of the present invention is to provide a silicon on insulator transistor structure. The structure comprises an insulating oxide layer separating a device layer of semiconductor material from a bulk semiconductor base region. A generally rectangular central channel region within the device layer semiconductor material is doped with an impurity element to increase free carriers. A source region and a drain region are positioned on opposing sides of the generally rectangular central channel region. Both the source region and the drain region comprise the device layer semiconductor material heavily doped with the impurity element. A gate, adjacent the channel region and forming a Schottky junction with the channel region, comprises a metal with an energy gap greater than the device layer semiconductor for controlling depletion of the free carriers within the channel region adjacent to the gate.
The silicon on insulator transistor structure also includes a backgate which is adjacent to the channel region and on an opposing side of the channel region from the gate. The backgate also forms a Schottky junction with the channel region and comprises the metal for controlling depletion of the free carriers within the channel region adjacent to the backgate.
The device layer semiconductor may be silicon and the impurity may be a donor impurity such as arsenic such that the free carriers may be electrons. The metal may be any of tungsten, titanium nitride, or silicide.
A third aspect of the present invention is to provide a method of controlling the flow of electricity between a source semiconductor region and a drain semiconductor region in a transistor. Both the source semiconductor region and the drain semiconductor region are heavily doped with an impurity element. The method comprises: a) positioning a generally rectangular central channel region between the source region and the drain region, the channel region lightly doped with the impurity element to increase free carriers; b) positioning a gate adjacent the channel region and extending along a side of the central channel region adjacent the source region and forming a junction with the channel region, the gate comprising a metal with an energy gap greater than the semiconductor for effecting depletion of the free carriers within the channel region adjacent to the gate; and c) varying the potential of the gate region relative to the source region to control depletion within the channel region.
The method may further include positioning a backgate adjacent the channel region, and on an opposing side of the channel region from the gate, and forming a junction with the channel region, the backgate comprising the metal and effecting depletion of the free carriers within the channel region adjacent to the backgate and varying the potential of the backgate relative to the source region to control depletion within the channel region.
The semiconductor may be silicon and the impurity may be a donor impurity such as arsenic such that the free carriers may be electrons. The metal may be any of tungsten, titanium nitride, or silicide.
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Buynoski Matthew S.
Xiang Qi
Advanced Micro Devices , Inc.
Menz Doug
Renner , Otto, Boisselle & Sklar, LLP
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