Optical: systems and elements – Mirror – With support
Reexamination Certificate
2001-05-18
2002-12-10
Sikder, Mohammad (Department: 2872)
Optical: systems and elements
Mirror
With support
C359S871000, C359S296000, C359S298000, C359S233000
Reexamination Certificate
active
06491404
ABSTRACT:
FIELD OF THE INVENTION
This invention relates to micromechanical apparatus, and more specifically, to moveable microstructures for use in optical and other microelectromechanical systems (MEMS).
BACKGROUND OF THE INVENTION
Microelectromechanical systems (MEMS) have been developed as alternatives to conventional electromechanical devices. MEMS devices are potentially low-cost devices, due to the use of microelectronic fabrication techniques. New functionality also may be provided, because MEMS devices can be much smaller than conventional electromechanical devices.
A common application of MEMS technology is in the fabrication of moveable mirrors and other optical devices. For example, MEMS techniques have been used to fabricate moveable micromirrors for use in directing light in devices such as bar code scanners, optical switches and projection video displays. Examples of MEMS micromirror structures are described in U.S. Pat. No. 6,186,399 to Stern et al., U.S. Pat. No. 6,201,629 to McClelland et al., U.S. Pat. No. 6,181,460 to Tran et al., and U.S. Pat. No. 6,134,042 to Dhuler et al.
Many conventional micromirror structures include a body that bears a mirror surface and that is suspended above a substrate by a “hinge” that provides rotation of the mirror surface about an axis. Arrays of such structures may be used in devices such as optical switches or video display devices. In many applications, it may be desirable to fabricate multiple mirrors with differing sizes and deflection angles on a single substrate.
SUMMARY OF THE INVENTION
According to embodiments of the present invention, an apparatus includes a microelectronic substrate and a tiltable body thereon. The tiltable body includes a plate configured to tilt about an axis and a tilt stop engaging portion axially displaced with respect to the plate. A range of rotation of the plate about the axis is defined by contact of the tilt stop engaging portion with a tilt stop on the substrate.
In some embodiments of the present invention, the microelectronic substrate has an opening therein configured to receive the plate, and the tilt stop comprises a surface of the microelectronic substrate adjacent the opening. In other embodiments of the present invention, the tiltable body is attached to the microelectronic substrate by first and second spaced apart supports. The tiltable body may include first and second beams attached to respective ones of the first and second spaced-apart supports. An optical device region, such as a mirror, a lens, a filter, a refractive or other optical coating, a prism, or an optical source, may be disposed on the plate. The apparatus may further include an actuator, such as an electrostatic actuator, that is operative to move the tiltable body about the axis.
In method embodiments of the present invention, a micromechanical device may be fabricated by forming a tiltable body on a microelectronic substrate, the tiltable body including a plate configured to tilt about an axis and a tilt stop engaging portion axially displaced with respect to the plate. A range of rotation of the plate about the axis is defined by contact of the tilt stop engaging portion with a tilt stop on the substrate. The range of rotation may be controlled by controlling the extent of the tilt stop engaging portion.
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An et al., “Two-Input Axis Angular Rate Sensor,” Part of the SPIE Conference on Smart Electronics and MEMS, SPIE vol. 3673, Mar. 1999, pp. 218-229.
Kim et al., “Fabrication and Deflection Measurement of Micromirrors Supported by a S-shape Girder,” Part of the SPIE Conference on Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, SPIE vol. 3633, Jan. 1999, pp. 138-147.
Wu et al., “Micromechanical Photonic Integrated Circuits,” IEICE Trans Electron, vol. E83-C, No. 6, Jun. 2000, pp. 903-911.
JDS Uniphase Corporation
Myers Bigel & Sibley & Sajovec
Sikder Mohammad
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