Cleaning and liquid contact with solids – Apparatus – For work having hollows or passages
Reexamination Certificate
1999-01-08
2002-12-03
Edwards, Laura (Department: 1734)
Cleaning and liquid contact with solids
Apparatus
For work having hollows or passages
C134S16700R, C134S16900A, C134S170000, C118S302000
Reexamination Certificate
active
06488041
ABSTRACT:
TECHNICAL FIELD
The present invention relates to in general to a method and system for cleaning and priming an extrusion head, and in particular to performing such cleaning and priming in a thorough and space efficient manner adaptable for use an automatic coating apparatus.
BACKGROUND
Extrusion coating is a known method of directly depositing process coatings onto substrates, wafers, flat panel displays, and similar objects (collectively “substrates”) in the microelectronics and display technology industries. According to a typical prior art system, substrates are transported linearly beneath an extrusion coating head, and process fluids are precisely dispensed from a linear orifice in the extrusion head using a microprocessor-based electrohydraulic pumping system. One such system is described in U.S. Pat. No. 4,696,885 entitled “METHOD OF FORMING A LARGE SURFACE AREA INTEGRATED CIRCUIT”. Depending on the particular application, such process fluids include photoresist, polyimides, color filter materials and the like. Such extrusion coating techniques are well-suited for research and development activities as well as high volume production requirements.
Although known extrusion systems of this type provide significant advantages as compared to other liquid deposition techniques (such as spin coating), they often suffer from a similar problem, specifically, the inability of the coating head to establish a uniform coating at the leading edge of the substrate during certain applications. In these systems, each substrate is a discrete part unlike a web coating process, and the coating deposition is therefore started and stopped with each new substrate. With such part by part processing, a coating “bead” must be re-formed between the extrusion head and each new substrate to thereby “wet” the surfaces. When this bead initially contacts the substrate, however, it may cause a “perturbation” for some measurable distance (e.g., 5-20 mm) from the leading edge of the coating. Sometimes a leading edge anomaly of this type dictates that the substrate be rejected completely, thus increasing material and process costs and decreasing process efficiency.
There have been attempts in the art to address the problem of establishing a uniform coating condition in a linear or so-called slot type extrusion coater, and systems of this type are illustrated in U.S. Pat. No. 4,938,994 entitled “METHOD AND APPARATUS FOR PATCH COATING PRINTED CIRCUIT BOARDS” and U.S. Pat No. 5,183,508 titled “APPARATUS FOR PATCH COATING PRINTED CIRCUIT BOARDS”. In these patents, a controlled volumetric flow rate of the liquid is delivered to a liquid containing chamber within the extrusion head and then through the applicator slot to create what is said to be a uniform volumetric flow rate of liquid exiting from each point along the slot. A displacement piston associated with the extrusion head generates a fluid pulse to control the formation of a connecting bead of the liquid coating prior to, at the same time as, or after the sending of the controlled volumetric flow rate of the liquid. This technique purports to apply a layer of the liquid with a precisely-controlled volume per unit area of the liquid to the substrate. Prior art machines also include a slot sealing unit that cleans the extrusion head slot between applications. The prior art systems however, do not effect a condition for the extrusion head at the beginning of a coating operation which mimics the head's condition in the middle of a coating operation. Therefore the problem of a gradual drift towards a steady state coating rate remains, resulting in leading edge perturbations. Therefore, prior art techniques do not adequately address the problem of leading edge perturbations that may affect the uniformity of the coating.
In order to avoid dripping or smearing coating material which has gathered around the extrusion head after a coating operation, it is often necessary to clean the extrusion head before a new coating operation begins. In the prior art, cleaning of extrusion mechanisms is usually accomplished manually, potentially leading to inconsistent results and disruption and delay of the coating operations. The presence of residual coating material on the extrusion during a coating operation can result in unwanted deposition of coating material, or contaminants which have collected on the residual material, on the substrate and/or on part of the coating apparatus. Therefore, it is a problem in the art that manual cleaning operations are inconsistent and unreliable.
Therefore there is a need in the art for a mechanism to overcome the problem of leading edge anomalies arising during the slot type coating of substrates in a batch process.
There is a further need in the art for a mechanism which will effectively and consistently clean an extrusion head so as to prevent dripping coating material onto a substrate or other surface.
SUMMARY OF THE INVENTION
These and other objects, features and technical advantages are achieved by a system and method which provides for a cleaning and priming assembly enabling automatic cleaning and priming of an extrusion or dispensing head at selected times.
A preferred embodiment of the present invention comprises a station comprising a cleaning station and a priming station at which cleaning and priming operations can preferably be performed automatically upon bringing an extrusion head to said station.
In a preferred embodiment of the invention, one cleaning operation would comprise a forceful cleaning process in which particularly viscous or heavy fluid buildups, including dried coating material, could be cleaned from the exterior of an extrusion head, which buildups are not amenable to being cleaned by fluid alone. Preferably, this forceful cleaning operation is performed at a scrubbing station. The forceful cleaning operation preferably involves direct mechanical contact between elements of the cleaning station and the extrusion head. In a preferred embodiment, this mechanical contact is in the form of scrubbers which contact a sufficient distance along the exterior of the extrusion head to remove all material buildup.
Preferably, the scrubbers comprise a large number of bristles which contact the extrusion head thereby transferring coating material from the head to the bristles. Alternatively, the scrubbers could comprise a surface comprising cloth, sponge or other suitable material which contacts the head and removes material through a combination of absorption and wiping contact.
The forceful cleaning mechanism, whether bristles or other device, preferably contacts the head in conjunction with a fluid spray or rinse to assist in transferring coating material away from the exterior of the head. Preferably, fluid would be kept in a reservoir and be continuously pumped toward the point of contact between the bristles or other contact device and the extrusion head. A constant pool of fluid could be used which would preferably be replaced at selected intervals. In a preferred embodiment, the fluid to be used in conjunction with the scrubbers is a strong solvent consistent with the expectation that this cleaning operation is directed toward cleanup of viscous material. The use of a solvent aids in the cleaning process by helping break down the coating material while it is still on the head surface and in keeping the scrubbers clean by dissolving coating material which has been transferred onto the scrubbers. Alternatively, a chemically inert or other fluid could be employed to provide lubrication for the contact of the cleaning mechanism with the head as well as to carry away coating material which has been removed.
Preferably, relative motion would be implemented between the bristles or other contact device and the head in order to achieve the most thorough possible scrubbing coverage of the surface to be cleaned of excess material. In a preferred embodiment, at least one cylindrical scrubber would rotate about an axis parallel to the head, against the surface of the head, thereby providing the desired relative motion
Gibson Gregory M.
Hawes John E.
Kabbani Samer Mahmoud
Snodgrass Ocie T.
Edwards Laura
Ehrlich Henry L.
FAStar, Ltd.
Winstead Sechrest & Minick P.C.
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