Micromotion mechanical structure and a process for the productio

Details Micromotion mechanical structure and a process for the productio Micromotion mechanical structure and a process for the productio

1993-04-20

1995-06-27

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

H01N 100

Patent

active

054282594

ABSTRACT:
In a micromotion mechanical structure, such as a vibration-type sensor or a step motor, comprising at least one fixed electrode and at least one movable electrode which is moved by electrostatic power applied to the fixed electrode, at least one of the electrodes is formed essentially by a single crystal semiconductor material. The single crystal semiconductor material has various merits of uniform mechanical properties, small internal stress, etc. for use in such electrodes. Such structure has been realized by attaching patterned electrode made of the material to another substrate and then removing or thinning the original substrate carrying the patterned electrodes.

REFERENCES:
patent: 4381672 (1983-05-01), O'Conner
patent: 4754185 (1988-06-01), Gabriel et al.
patent: 4943750 (1990-07-01), Howe et al.
patent: 5013954 (1991-05-01), Shibaike et al.
patent: 5015906 (1991-05-01), Cho et al.
patent: 5043043 (1991-08-01), Howe et al.
patent: 5055731 (1991-10-01), Nihei et al.

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