Scanning electron microscope

Details Scanning electron microscope Scanning electron microscope

1993-10-19

1995-02-14

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

25044111, H01J 31256

Patent

active

053897870

ABSTRACT:
In a scanning electron microscope with such a structure that a retarding static field for an electron beam is produced between an objective lens and a sample, when the following three conditions can be satisfied, a switch for applying a superimposed voltage is closed to apply the superimposed voltage to the sample. In the first condition, a switch for applying an acceleration voltage is closed and the acceleration voltage 5 is applied. In the second condition, both of a valve and a valve are opened which are provided between a cathode and the sample. In the third condition, when the sample is mounted on a sample stage by a sample replacing mechanism 57, a valve through which the sample passes is closed. The sample stage is electrically connected via a discharge resistor to a sample holder, and when the switch is opened, electric charges charged on the sample are discharged through the sample holder and the sample stage. As a result, when the sample is mounted/released onto/from the sample stage, the application of the voltage to the sample is automatically interrupted.

REFERENCES:
patent: 3714425 (1973-01-01), Someya et al.
patent: 3736422 (1973-05-01), Weber et al.
patent: 3792263 (1974-02-01), Hashimoto et al.
IEEE 9th Annual Symposium on Electron, Ion and Laser Technology, pp. 176-186.

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