Electricity: measuring and testing – Magnetic – Magnetometers
Reexamination Certificate
2008-06-03
2008-06-03
Assouad, Patrick (Department: 2862)
Electricity: measuring and testing
Magnetic
Magnetometers
C324S249000
Reexamination Certificate
active
07382123
ABSTRACT:
A micro-machining method of manufacturing a micro fluxgate sensor manufactured having an amorphous magnetic core includes forming lower coils of an excitation coil and a magnetic field detecting coil on a wafer, depositing a first insulating layer on the lower coils and forming an amorphous magnetic core, depositing a second insulating layer on the amorphous magnetic core and forming upper coils connected to the lower coils to complete the excitation coil and the magnetic field detecting coil, and covering the excitation coil and the magnetic field detecting coil with a protective film, and etching the protective film to expose a portion of the excitation coil and magnetic field detecting coil, thereby forming a pad.
REFERENCES:
patent: 5583474 (1996-12-01), Mizoguchi et al.
patent: 5642046 (1997-06-01), Hawks
patent: 5933758 (1999-08-01), Jain
patent: 6078239 (2000-06-01), Hu
patent: 6411086 (2002-06-01), Choi et al.
patent: 6429651 (2002-08-01), Choi et al.
patent: 6690164 (2004-02-01), Fedeli et al.
patent: 6725528 (2004-04-01), Nishi
patent: 2004/0027121 (2004-02-01), Choi et al.
patent: 64001981 (1989-01-01), None
patent: 08-179023 (1996-07-01), None
patent: 10-321561 (1998-12-01), None
patent: 2001-015367 (2001-01-01), None
patent: 2001-084510 (2001-03-01), None
patent: 2001-099654 (2001-04-01), None
patent: 2001-110639 (2001-04-01), None
Liakopoulos, T.M., et al., “A micro-fluxgate magnetic sensor using micromachined planar solenoid coils”, Sensors & Actuators A, Elsevier Sequoia, S.,A. Lausanne, CH (Swizterland), vol. 77, No. 1, pp. 66-72, (Sep. 28, 1999).
Shim, Dong-Sik, et al., “Micro fluxgate sensor using solenoid driving and sensing coils”, Optoelectronic and Microelectronic Materials and Devices, 2002, Piscataway, NJ, USA, IEEE, pp. 237-240, (Dec. 11, 2002).
Choi Sang-on
Na Kyung-won
Park Hae-seok
Shim Dong-sik
Assouad Patrick
Lee & Morse P.C.
Samsung Electronics Co,. Ltd.
Schindler David M.
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