Semiconductor device, mask for impurity implantation, and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C438S286000, C438S301000, C438S306000

Reexamination Certificate

active

07315062

ABSTRACT:
A semiconductor device includes: a semiconductor substrate having a source region and a drain region; and an offset region that is provided in the semiconductor substrate and extends from an edge of a gate electrode toward the drain region. The offset region includes multiple regions having different impurity concentrations formed by an ion implantation with a mask having an opening ratio that changes from the gate electrode to the drain region and by subsequent thermal treatment. The multiple regions include a concentration gradient region that is interposed between adjacent ones of the multiple regions and has the impurity concentration that gradually changes.

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