Ion source with multi-piece outer cathode

Details Ion source with multi-piece outer cathode Ion source with multi-piece outer cathode

2008-07-29

2008-07-29

Berman, Jack I. (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S427000, C250S424000, C250S492300, C250S426000, C315S111810, C315S111210, C315S111910, C315S111410, C313S361100, C313S359100, C313S154000, C313S161000

Reexamination Certificate

active

07405411

ABSTRACT:
In certain example embodiments of this invention, there is provided an ion source including an anode and a cathode. In certain example embodiments, a multi-piece outer cathode is provided. The multi-piece outer cathode allows precision adjustments to be made, thereby permitting adjustment of the magnetic gap between the inner and outer cathodes. This allows improved performance to be realized, and/or prolonged operating life of certain components. This may also permit multiple types of gap adjustment to be performed with different sized outer cathode end pieces. In certain example embodiments, cathode fabrication costs may also be reduced.

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