Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2008-04-08
2008-04-08
Baumeister, B. William (Department: 2891)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
C257S418000, C257SE21327, C200S181000
Reexamination Certificate
active
07354787
ABSTRACT:
A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.
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DeBruyker Dirk
Dunec John L.
Hantschel Thomas
Peeters Eric
Rosa Michel A.
Baumeister B. William
Chen Kent
Fulk Steven J.
Xerox Corporation
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