Apparatus for drying substrate and method thereof

Details Apparatus for drying substrate and method thereof Apparatus for drying substrate and method thereof

2008-01-29

2008-01-29

Douglas, Steven O. (Department: 3771)

Fluent material handling, with receiver or receiver coacting mea

Plural materials, material supplies or charges in a receiver

C118S042000

Reexamination Certificate

active

07322385

ABSTRACT:
An apparatus for drying a substrate using the Marangoni effect is disclosed. The apparatus includes a rotatable supporting portion on which a substrate is placed. A first nozzle for supplying de-ionized water and a second nozzle for supplying isopropyl alcohol vapor are provided on the supporting portion. When the isopropyl alcohol vapor is supplied to the center of the substrate at the initial stage, the amount of alcohol that reaches the substrate is controlled by a controlling portion such that the amount of the second liquid gradually increases.

REFERENCES:
patent: 5942035 (1999-08-01), Hasebe et al.
patent: 6858091 (2005-02-01), Boyd et al.
patent: 1999-0075167 (1999-10-01), None
patent: 10-2004-0015811 (2004-02-01), None
patent: 1020040028385 (2004-04-01), None

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