Scanning electron microscope for observation of cross section an

Details Scanning electron microscope for observation of cross section an Scanning electron microscope for observation of cross section an

1990-10-23

1992-03-03

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, 250307, 250309, 2504922, 2504921, H01J 3700

Patent

active

050935720

ABSTRACT:
Disclosed are a scanning electron microscope for cross section observation capable of cutting more accurately a cross section of a specific portion of semiconductor wafer in a shorter time, and a cross section observing method employing such a microscope. The scanning electron microscope includes an SEM column 100, an FIB column 200 mounted together with SEM column 100, and a reflected-electron detector 21 for detecting electrons to be reflected from the semiconductor wafer by scanning with an electron beam 30 from the SEM. Thus, since a process of cutting a cross section to be observed by scanning with an ion beam 31 from FIB column 200 can be observed in real time by employing the reflected electrons of electron beam 30 from SEM column 100, a specific portion of the cross section can be cut more accurately in a shorter time.

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