Fault-tolerant anti-reflective coatings

Details Fault-tolerant anti-reflective coatings Fault-tolerant anti-reflective coatings

1988-04-19

1990-10-30

Arnold, Bruce Y.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

350164, 156662, 427162, 427165, 4274193, G02B 110

Patent

active

049664379

ABSTRACT:
A method for producing a narrow band anti-reflective film on a substrate, and the film produced by that method.
Uses the concept of considering a multifilm dielectric to be an equivalent two-film dielectric, then removing a predetermined thickness of the outer, lower dielectric, film to cause the complete multifilm to become anti-reflective.
When limited numbers of film materials are available, uses an EIL or effective index layer concept to obtain a predetermined index of refraction which improves the tolerance of the reflection of an anti-reflective film to film thickness errors.

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