Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2011-08-23
2011-08-23
Chu, John S (Department: 1722)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S907000, C430S910000
Reexamination Certificate
active
08003296
ABSTRACT:
The present invention provides a chemically amplified positive composition comprising:(A) a resin comprising a structural unit having an acid-labile group and being itself insoluble or poorly soluble in an alkali aqueous solution but becoming soluble in an alkali aqueous solution by the action of an acid,(B) a resin comprising a structural unit represented by the formula (I):wherein R1represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, Z represents a single bond or —(CH2)k—CO—X4—, k represents an integer of 1 to 4, X1, X2, X3and X4each independently represents an oxygen atom or a sulfur atom, m represents an integer of 1 to 3 and n represents an integer of 0 to 3, and a structural unit having a fluorine atom in a side chain, andan acid generator.
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Hashimoto Kazuhiko
Miyagawa Takayuki
Shigematsu Junji
Shimada Masahiko
Yamamoto Satoshi
Birch & Stewart Kolasch & Birch, LLP
Chu John S
Sumitomo Chemical Company Limited
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