Method and apparatus for detecting pattern defects

Details Method and apparatus for detecting pattern defects Method and apparatus for detecting pattern defects

2011-03-22

2011-03-22

Mariam, Daniel G (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S224000

Reexamination Certificate

active

07912276

ABSTRACT:
With the objective of achieving defect kind training in a short period of time to teach classification conditions of defects detected as a result of inspecting a thin film device, according to one aspect of the present invention, there is provided a visual inspection method, and an apparatus therefor, comprising the steps of: detecting defects based on inspection images acquired by optical or electronic defect detection means, and at the same time calculating features of the defects; and classifying the defects according to classification conditions set beforehand, wherein said classification condition setting step further includes the steps of: collecting defect features over a large number of defects acquired beforehand from the defect detection step; sampling defects based on the distribution of the collected defect features over the large number of defects; and setting defect classification conditions based on the result of reviewing the sampled defects.

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