Optics: measuring and testing – Dimension
Reexamination Certificate
2011-03-08
2011-03-08
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Dimension
C356S394000, C716S030000
Reexamination Certificate
active
07903264
ABSTRACT:
Wavelength dispersion of intensity of light reflected from an evaluation object is measured. A complex refractive index of a substance forming the evaluation object and the environment are prepared. Virtual component ratios comprising a mixture ratio of the substances forming the evaluation object and the environment are prepared. Reflectance wavelength dispersions to the virtual component ratios are calculated. Similar reflectance wavelength dispersions having a small difference with the measured wavelength dispersion are extracted from the reflectance wavelength dispersions. Weighted average to the virtual component ratios used for calculating the similar reflectance wavelength dispersions are calculated to obtain a component ratio of the substance forming the evaluation object and the environment so that weighting is larger when the difference is smaller. A structure of the evaluation object is determined from the calculated component ratio.
REFERENCES:
patent: 5523840 (1996-06-01), Nishizawa et al.
patent: 5587792 (1996-12-01), Nishizawa et al.
patent: 5963329 (1999-10-01), Conrad et al.
patent: 6187488 (2001-02-01), Hayasaki et al.
patent: 6423977 (2002-07-01), Hayasaki et al.
patent: 6686130 (2004-02-01), Hayasaki et al.
patent: 6819426 (2004-11-01), Sezginer et al.
patent: 6825938 (2004-11-01), Mikami et al.
patent: 6900892 (2005-05-01), Shchegrov et al.
patent: 6947141 (2005-09-01), Bischoff et al.
patent: 7321426 (2008-01-01), Poslavsky et al.
patent: 2005/0168758 (2005-08-01), Hayasaki et al.
patent: 2001-217291 (2001-08-01), None
patent: 2002-25883 (2002-01-01), None
patent: WO 03/106916 (2003-12-01), None
Notice of Reasons for Rejection mailed by the Japanese Patent Office on Jul. 22, 2008, for Japanese Patent Application No. 2004-021647, and English-language translation thereof.
Hayasaki Kei
Ito Shin'ichi
Kotani Toshiya
Mikami Toru
Yamazaki Yuichiro
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Nguyen Sang
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